Masterclass Certificate in Plasma Ashing for MEMS Fabrication
-- ViewingNowThe Masterclass Certificate in Plasma Ashing for MEMS Fabrication is a comprehensive course designed to equip learners with critical skills in microelectromechanical systems (MEMS) manufacturing. Plasma ashing is a crucial process in MEMS fabrication, and this course offers in-depth knowledge and practical experience in this area.
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⢠Fundamentals of Plasma Ashing: An introduction to the basics of plasma ashing, its principles, and mechanisms. This unit covers the chemical and physical processes involved in plasma etching and ashing, and the factors affecting the etch rate and selectivity.
⢠Plasma Generation Techniques: This unit focuses on the generation of plasma for MEMS fabrication, including RF and microwave discharges, and the design of plasma reactors. It covers the fundamentals of plasma diagnostics and the characterization of plasma properties.
⢠Plasma Ashing Processes for MEMS Fabrication: An in-depth analysis of plasma ashing processes used in MEMS fabrication, including isotropic and anisotropic etching, and the use of different gases such as O2, CF4, and SF6.
⢠Plasma Etching and Ashing Equipment: An overview of the equipment used in plasma etching and ashing, including parallel plate reactors, ICP etchers, and ECR etchers. This unit covers the design and operation of these systems and their advantages and limitations.
⢠Plasma Etching and Ashing Applications in MEMS: This unit explores the various applications of plasma etching and ashing in MEMS fabrication, including sacrificial layer etching, surface micromachining, and bulk micromachining. It covers the design and fabrication of MEMS devices using plasma etching and ashing techniques.
⢠Process Control and Optimization: This unit focuses on the process control and optimization of plasma etching and ashing, including the measurement and control of etch rate and selectivity, and the optimization of plasma parameters.
⢠Safety and Environmental Considerations: An overview of the safety and environmental considerations in plasma etching and ashing, including the handling and disposal of hazardous materials, and the design of safe and environmentally friendly plasma processes.
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